YieldWatchDog
Spatial Signature Module
SSC

The Spatial Signature Control Module (SSC) allows the early detection of tool-specific, custom-defined failure mechanisms.

Key Features:
Identification of wafers with similar patterns on bin maps
• Similar patterns are detected automatically, no need for teaching patterns
• Detection is independent from product layout or shot map setup
• Identification of new patterns even if they have different angular orientation

The Spatial Signature Control Module (SSC) allows the early detection of tool-specific, custom-defined failure mechanisms. Identification of wafers with similar patterns on bin maps big data software for semiconductor fabs

Spatial Signature Control Module (SSC)

 

Monitoring bin maps of appearance of known patterns
• Automatically detected patterns can be used for monitoring
• Alternatively, patterns may be defined manually or by using historic data

Spatial Signature Control Module allows the early detection of tool-specific, custom-defined failure mechanisms.

Spatial Signature Control Module allows the early detection of tool-specific, custom-defined failure mechanisms.

Spatial Signature Control Module allows the early detection of tool-specific, custom-defined failure mechanisms. SSC designed by DR YIELD software & solutions GmbH - big data software for semiconductor fabs