Advanced Quality Module
The Advanced Quality Module (AQM) identifies ICs that pass test limits, but show suspicious deviation from other tested parts. The AQM is designed especially for use in quality critical areas. The identification of quality compromised ICs goes beyond „part average testing“ due to a model-free approach (there is no normal-distribution assumption).
Indicates potential quality compromised parts based on ...
• Neighborhood Rules
• Value Shift between different measurements
• PAT (Part Average Testing), static and dynamic
• Higher failure rate on shot/reticle position
• Higher failure rate on stacked wafer map
Comprehensive visualization of quality related data in trend charts, histograms and wafer maps.