YieldWatchDog
Spatial Signature Module
SSC
The Spatial Signature Control Module (SSC) allows the early detection of tool-specific, custom-defined failure mechanisms.
Key Features:
Identification of wafers with similar patterns on bin maps
• Similar patterns are detected automatically, no need for teaching patterns
• Detection is independent from product layout or shot map setup
• Identification of new patterns even if they have different angular orientation
Monitoring bin maps of appearance of known patterns
• Automatically detected patterns can be used for monitoring
• Alternatively, patterns may be defined manually or by using historic data
